Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6978673 | Methods and systems for simultaneously fabricating multi-frequency MEMS devices | Burgess R. Johnson, Max C. Glenn, William P. Platt, David K. Arch | 2005-12-27 |
| 6865944 | Methods and systems for decelerating proof mass movements within MEMS structures | Max C. Glenn, William P. Platt | 2005-03-15 |