Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6978673 | Methods and systems for simultaneously fabricating multi-frequency MEMS devices | Burgess R. Johnson, Max C. Glenn, David K. Arch, Mark W. Weber | 2005-12-27 |
| 6959583 | Passive temperature compensation technique for MEMS devices | — | 2005-11-01 |
| 6865944 | Methods and systems for decelerating proof mass movements within MEMS structures | Max C. Glenn, Mark W. Weber | 2005-03-15 |
| 6860151 | Methods and systems for controlling movement within MEMS structures | Burgess R. Johnson | 2005-03-01 |
| 6837108 | Increasing the dynamic range of a MEMS gyroscope | — | 2005-01-04 |