Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916396 | Etching system and etching method | Akira Kagoshima, Motohiko Yoshigai, Hideyuki Yamamoto, Daisuke Shiraishi, Junichi Tanaka +1 more | 2005-07-12 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai +2 more | 2005-04-19 |