Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949735 | Beam source | Masahiro Hatakeyama, Katsunori Ichiki, Kenji Watanabe | 2005-09-27 |
| 6921722 | Coating, modification and etching of substrate surface with particle beam irradiation of the same | Naoaki Ogure, Kuniaki Horie, Yuji Araki, Hiroshi Nagasaka, Momoko Kakutani | 2005-07-26 |
| 6909092 | Electron beam apparatus and device manufacturing method using same | Ichirota Nagahama, Yuichiro Yamazaki, Kenji Watanabe, Masahiro Hatakeyama, Nobuharu Noji | 2005-06-21 |
| 6855929 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji, Takeshi Murakami +6 more | 2005-02-15 |
| 6853143 | Electron beam system and method of manufacturing devices using the system | Mamoru Nakasuji, Takao Kato, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji | 2005-02-08 |