Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949735 | Beam source | Katsunori Ichiki, Kenji Watanabe, Tohru Satake | 2005-09-27 |
| 6909092 | Electron beam apparatus and device manufacturing method using same | Ichirota Nagahama, Yuichiro Yamazaki, Kenji Watanabe, Tohru Satake, Nobuharu Noji | 2005-06-21 |
| 6855929 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2005-02-15 |