Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909092 | Electron beam apparatus and device manufacturing method using same | Ichirota Nagahama, Yuichiro Yamazaki, Kenji Watanabe, Masahiro Hatakeyama, Tohru Satake | 2005-06-21 |
| 6881268 | Method and apparatus for forming required gas atmosphere | Setsuji Shinoda, Toshiharu Nakazawa, Shunichi Aiyoshizawa | 2005-04-19 |
| 6869890 | Processing apparatus to be sealed against workpiece | Hiroshi Sobukawa, Masami Nagayama, Koji Ono, Mutsumi Saito | 2005-03-22 |
| 6855929 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Takeshi Murakami +6 more | 2005-02-15 |
| 6853143 | Electron beam system and method of manufacturing devices using the system | Mamoru Nakasuji, Takao Kato, Tohru Satake, Kenji Watanabe, Takeshi Murakami | 2005-02-08 |