Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6869890 | Processing apparatus to be sealed against workpiece | Nobuharu Noji, Hiroshi Sobukawa, Masami Nagayama, Koji Ono | 2005-03-22 |
| 6855929 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2005-02-15 |