Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6940080 | Charged particle beam lithography system, lithography method using charged particle beam, method of controlling charged particle beam, and method of manufacturing semiconductor device | Osamu Nagano, Susumu Hashimoto, Atsushi Ando | 2005-09-06 |
| 6909092 | Electron beam apparatus and device manufacturing method using same | Ichirota Nagahama, Kenji Watanabe, Masahiro Hatakeyama, Tohru Satake, Nobuharu Noji | 2005-06-21 |