Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949735 | Beam source | Masahiro Hatakeyama, Kenji Watanabe, Tohru Satake | 2005-09-27 |
| 6909087 | Method of processing a surface of a workpiece | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2005-06-21 |
| 6909086 | Neutral particle beam processing apparatus | Seiji Samukawa, Kazuo Yamauchi, Hirokuni Hiyama | 2005-06-21 |
| 6861643 | Neutral particle beam processing apparatus | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2005-03-01 |
| 6861642 | Neutral particle beam processing apparatus | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2005-03-01 |
| 6858838 | Neutral particle beam processing apparatus | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2005-02-22 |
| 6849857 | Beam processing apparatus | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2005-02-01 |