Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909086 | Neutral particle beam processing apparatus | Seiji Samukawa, Katsunori Ichiki, Hirokuni Hiyama | 2005-06-21 |
| 6909087 | Method of processing a surface of a workpiece | Katsunori Ichiki, Hirokuni Hiyama, Seiji Samukawa | 2005-06-21 |
| 6861642 | Neutral particle beam processing apparatus | Katsunori Ichiki, Hirokuni Hiyama, Seiji Samukawa | 2005-03-01 |
| 6861643 | Neutral particle beam processing apparatus | Katsunori Ichiki, Hirokuni Hiyama, Seiji Samukawa | 2005-03-01 |
| 6858838 | Neutral particle beam processing apparatus | Katsunori Ichiki, Hirokuni Hiyama, Seiji Samukawa | 2005-02-22 |
| 6849857 | Beam processing apparatus | Katsunori Ichiki, Hirokuni Hiyama, Seiji Samukawa | 2005-02-01 |