Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972256 | Method and apparatus for forming thin film of metal | Akira Fukunaga, Kuniaki Horie, Takao Kato, Hiroshi Nagasawa, Shinji Kajita +1 more | 2005-12-06 |
| 6929722 | Substrate plating apparatus | Akihisa Hongo, Hiroaki Inoue, Norio Kimura, Fumio Kuriyama, Manabu Tsujimura +2 more | 2005-08-16 |
| 6921722 | Coating, modification and etching of substrate surface with particle beam irradiation of the same | Kuniaki Horie, Yuji Araki, Hiroshi Nagasaka, Momoko Kakutani, Tohru Satake | 2005-07-26 |