Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953390 | Polishing apparatus | Hiroshi Yoshida, Tetsuji Togawa | 2005-10-11 |
| 6942541 | Polishing apparatus | Tetsuji Togawa, Ritsuo Kikuta | 2005-09-13 |
| 6918814 | Polishing apparatus | Seiji Katsuoka, Manabu Tsujimura, Hiroyuki Osawa | 2005-07-19 |
| 6878044 | Polishing apparatus | Tetsuji Togawa, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2005-04-12 |
| 6852019 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2005-02-08 |