Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6957998 | Polishing apparatus | — | 2005-10-25 |
| 6953390 | Polishing apparatus | Kunihiko Sakurai, Hiroshi Yoshida | 2005-10-11 |
| 6942541 | Polishing apparatus | Kunihiko Sakurai, Ritsuo Kikuta | 2005-09-13 |
| 6926585 | Pressure control system and polishing apparatus | — | 2005-08-09 |
| 6899604 | Dressing apparatus and polishing apparatus | Ikutaro Noji, Shunichiro Kojima, Nobuyuki Takada | 2005-05-31 |
| 6878044 | Polishing apparatus | Kunihiko Sakurai, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2005-04-12 |
| 6852019 | Substrate holding apparatus | Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima, Kunihiko Sakurai +4 more | 2005-02-08 |