Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899592 | Polishing apparatus and dressing method for polishing tool | Kazuto Hirokawa, Akira Kodera | 2005-05-31 |
| 6899604 | Dressing apparatus and polishing apparatus | Tetsuji Togawa, Ikutaro Noji, Nobuyuki Takada | 2005-05-31 |
| 6852019 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more | 2005-02-08 |