Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899604 | Dressing apparatus and polishing apparatus | Tetsuji Togawa, Shunichiro Kojima, Nobuyuki Takada | 2005-05-31 |
| 6852019 | Substrate holding apparatus | Tetsuji Togawa, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima, Kunihiko Sakurai +4 more | 2005-02-08 |