Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899604 | Dressing apparatus and polishing apparatus | Tetsuji Togawa, Ikutaro Noji, Shunichiro Kojima | 2005-05-31 |
| 6878044 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2005-04-12 |
| 6852019 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2005-02-08 |