Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890402 | Substrate holding apparatus and substrate polishing apparatus | Yoshihiro Gunji, Hozumi Yasuda, Hiroshi Yoshida | 2005-05-10 |
| 6852019 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Hozumi Yasuda, Shunichiro Kojima, Kunihiko Sakurai +4 more | 2005-02-08 |