Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6918814 | Polishing apparatus | Manabu Tsujimura, Kunihiko Sakurai, Hiroyuki Osawa | 2005-07-19 |
| 6844274 | Substrate holder, plating apparatus, and plating method | Junichiro Yoshioka, Masahiko Sekimoto, Yasuhiko Endo, Yugang Guo | 2005-01-18 |