Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806951 | Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen | Dan Wack, Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad +1 more | 2004-10-19 |
| 6738136 | Accurate small-spot spectrometry instrument | Adam E. Norton, Abdurrahman Sezginer, Fred E. Stanke | 2004-05-18 |
| 6721052 | Systems for measuring periodic structures | Guoheng Zhao, Kenneth P. Gross, Mehrdad Nikoonahad | 2004-04-13 |
| 6686996 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Hans J. Hansen, David W. Shortt, Daniel Kavaldjiev +1 more | 2004-02-03 |