Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6778273 | Polarimetric scatterometer for critical dimension measurements of periodic structures | Abdurrahman Sezginer, Fred E. Stanke | 2004-08-17 |
| 6753961 | Spectroscopic ellipsometer without rotating components | Kenneth C. Johnson, Fred E. Stanke, Abdurrahman Sezginer | 2004-06-22 |
| 6738136 | Accurate small-spot spectrometry instrument | Abdurrahman Sezginer, Fred E. Stanke, Rodney Smedt | 2004-05-18 |
| 6677602 | Notch and flat sensor for wafer alignment | — | 2004-01-13 |