Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819426 | Overlay alignment metrology using diffraction gratings | Abdurrahman Sezginer, Fred E. Stanke | 2004-11-16 |
| 6806105 | Method of measuring meso-scale structures on wafers | Fred E. Stanke | 2004-10-19 |
| 6804003 | System for analyzing surface characteristics with self-calibrating capability | Haiming Wang, Patrick M. Maxton, Mehrdad Nikoonahad | 2004-10-12 |
| 6768967 | Database interpolation method for optical measurement of diffractive microstructures | Fred E. Stanke | 2004-07-27 |
| 6753961 | Spectroscopic ellipsometer without rotating components | Adam E. Norton, Fred E. Stanke, Abdurrahman Sezginer | 2004-06-22 |
| 6734968 | System for analyzing surface characteristics with self-calibrating capability | Haiming Wang, Patrick M. Maxton, Mehrdad Nikoonahad | 2004-05-11 |