Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829054 | Integrated surface metrology | Talat Hasan, Michael F. Weber | 2004-12-07 |
| 6819426 | Overlay alignment metrology using diffraction gratings | Abdurrahman Sezginer, Kenneth C. Johnson | 2004-11-16 |
| 6806105 | Method of measuring meso-scale structures on wafers | Kenneth C. Johnson | 2004-10-19 |
| 6778273 | Polarimetric scatterometer for critical dimension measurements of periodic structures | Adam E. Norton, Abdurrahman Sezginer | 2004-08-17 |
| 6768967 | Database interpolation method for optical measurement of diffractive microstructures | Kenneth C. Johnson | 2004-07-27 |
| 6753961 | Spectroscopic ellipsometer without rotating components | Adam E. Norton, Kenneth C. Johnson, Abdurrahman Sezginer | 2004-06-22 |
| 6738136 | Accurate small-spot spectrometry instrument | Adam E. Norton, Abdurrahman Sezginer, Rodney Smedt | 2004-05-18 |
| 6690473 | Integrated surface metrology | Talat Hasan, Michael F. Weber | 2004-02-10 |