Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806966 | Copper CMP flatness monitor using grazing incidence interferometry | Dieter Mueller, Cedric Affentauschegg | 2004-10-19 |
| 6781688 | Process for identifying defects in a substrate having non-uniform surface properties | Mehdi Vaez-Iravani, David W. Shortt | 2004-08-24 |
| 6686996 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, Rodney Smedt, Hans J. Hansen, David W. Shortt, Daniel Kavaldjiev +1 more | 2004-02-03 |