Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6781688 | Process for identifying defects in a substrate having non-uniform surface properties | George Kren, David W. Shortt | 2004-08-24 |
| 6724473 | Method and system using exposure control to inspect a surface | Jenn-Kuen Leong, Guoheng Zhao | 2004-04-20 |
| 6710876 | Metrology system using optical phase | Mehrdad Nikoonahad, Guoheng Zhao, Ian Smith | 2004-03-23 |