Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753528 | System for MEMS inspection and characterization | Mehrdad Nikoonahad | 2004-06-22 |
| 6724473 | Method and system using exposure control to inspect a surface | Jenn-Kuen Leong, Mehdi Vaez-Iravani | 2004-04-20 |
| 6721052 | Systems for measuring periodic structures | Kenneth P. Gross, Rodney Smedt, Mehrdad Nikoonahad | 2004-04-13 |
| 6710876 | Metrology system using optical phase | Mehrdad Nikoonahad, Ian Smith, Mehdi Vaez-Iravani | 2004-03-23 |
| 6707540 | In-situ metalization monitoring using eddy current and optical measurements | Kurt Lehman, Shing Lee, Walter H. Johnson, John Fielden, Mehrdad Nikoonahad | 2004-03-16 |