Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806966 | Copper CMP flatness monitor using grazing incidence interferometry | Dieter Mueller, George Kren | 2004-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806966 | Copper CMP flatness monitor using grazing incidence interferometry | Dieter Mueller, George Kren | 2004-10-19 |