Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829559 | Methods and systems for determining a presence of macro and micro defects on a specimen | Gary Bultman, Kyle Brown, Mehrdad Nikoonahad, Dan Wack, John Fielden | 2004-12-07 |
| 6818459 | Methods and systems for determining a presence of macro defects and overlay of a specimen | Dan Wack, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, John Fielden | 2004-11-16 |
| 6812045 | Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation | Mehrdad Nikoonahad, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2004-11-02 |
| 6806951 | Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen | Dan Wack, Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad +1 more | 2004-10-19 |
| 6782337 | Methods and systems for determining a critical dimension an a presence of defects on a specimen | Dan Wack, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, John Fielden | 2004-08-24 |
| 6694284 | Methods and systems for determining at least four properties of a specimen | Mehrdad Nikoonahad, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2004-02-17 |
| 6689519 | Methods and systems for lithography process control | Kyle Brown, Matt Hankinson, Suresh Lakkapragada | 2004-02-10 |
| 6673637 | Methods and systems for determining a presence of macro defects and overlay of a specimen | Dan Wack, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, John Fielden | 2004-01-06 |