Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794304 | Method and apparatus for reducing microtrenching for borderless vias created in a dual damascene process | Shiqun Gu, Peter McGrath, Hong Lin, Jim Elmer | 2004-09-21 |
| 6743725 | High selectivity SiC etch in integrated circuit fabrication | Rongxiang Hu, Philippe Schoenborn | 2004-06-01 |
| 6713386 | Method of preventing resist poisoning in dual damascene structures | Rongxiang Hu, Yongbae Kim, Sang-Yun Lee, Hiroaki Takikawa, Shumay X. Dou +5 more | 2004-03-30 |
| 6686272 | Anti-reflective coatings for use at 248 nm and 193 nm | Sang-Yun Lee, Hongqiang Lu, Wei-Jen Hsia, Wilbur G. Catabay, Hiroaki Takikawa +1 more | 2004-02-03 |