Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6743725 | High selectivity SiC etch in integrated circuit fabrication | Philippe Schoenborn, Masaichi Eda | 2004-06-01 |
| 6713386 | Method of preventing resist poisoning in dual damascene structures | Yongbae Kim, Sang-Yun Lee, Hiroaki Takikawa, Shumay X. Dou, Sarah Neuman +5 more | 2004-03-30 |