Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713386 | Method of preventing resist poisoning in dual damascene structures | Rongxiang Hu, Sang-Yun Lee, Hiroaki Takikawa, Shumay X. Dou, Sarah Neuman +5 more | 2004-03-30 |
| 6686272 | Anti-reflective coatings for use at 248 nm and 193 nm | Sang-Yun Lee, Masaichi Eda, Hongqiang Lu, Wei-Jen Hsia, Wilbur G. Catabay +1 more | 2004-02-03 |