Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812134 | Dual layer barrier film techniques to prevent resist poisoning | Hong-Qiang Lu, Wilbur G. Catabay | 2004-11-02 |
| 6794756 | Integrated circuit structure having low dielectric constant material and having silicon oxynitride caps over closely spaced apart metal lines | Weidan Li, Wilbur G. Catabay | 2004-09-21 |
| 6790784 | Plasma treatment of low dielectric constant dielectric material to form structures useful in formation of metal interconnects and/or filled vias for intergrated circuit structure | Wilbur G. Catabay | 2004-09-14 |
| 6774057 | Method and structure for forming dielectric layers having reduced dielectric constants | Hong-Qiang Lu, Wilbur G. Catabay | 2004-08-10 |
| 6756674 | Low dielectric constant silicon oxide-based dielectric layer for integrated circuit structures having improved compatibility with via filler materials, and method of making same | Wilbur G. Catabay, Weidan Li, Joe W. Zhao | 2004-06-29 |
| 6686272 | Anti-reflective coatings for use at 248 nm and 193 nm | Sang-Yun Lee, Masaichi Eda, Hongqiang Lu, Wilbur G. Catabay, Hiroaki Takikawa +1 more | 2004-02-03 |