Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6743725 | High selectivity SiC etch in integrated circuit fabrication | Rongxiang Hu, Masaichi Eda | 2004-06-01 |
| 6713386 | Method of preventing resist poisoning in dual damascene structures | Rongxiang Hu, Yongbae Kim, Sang-Yun Lee, Hiroaki Takikawa, Shumay X. Dou +5 more | 2004-03-30 |
| 6673721 | PROCESS FOR REMOVAL OF PHOTORESIST MASK USED FOR MAKING VIAS IN LOW K CARBON-DOPED SILICON OXIDE DIELECTRIC MATERIAL, AND FOR REMOVAL OF ETCH RESIDUES FROM FORMATION OF VIAS AND REMOVAL OF PHOTORESIST MASK | Yong-Bae Kim | 2004-01-06 |