Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794314 | Method of forming ultrathin oxide layer | Ivo Raaijmakers, Marko Tuominen, Suvi Haukka | 2004-09-21 |
| 6723653 | Process for reducing defects in copper-filled vias and/or trenches formed in porous low-k dielectric material | — | 2004-04-20 |
| 6673721 | PROCESS FOR REMOVAL OF PHOTORESIST MASK USED FOR MAKING VIAS IN LOW K CARBON-DOPED SILICON OXIDE DIELECTRIC MATERIAL, AND FOR REMOVAL OF ETCH RESIDUES FROM FORMATION OF VIAS AND REMOVAL OF PHOTORESIST MASK | Philippe Schoenborn | 2004-01-06 |