Issued Patents 2004
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831315 | Conformal thin films over textured capacitor electrodes | Suvi Haukka, Ernst H. A. Granneman | 2004-12-14 |
| 6820570 | Atomic layer deposition reactor | Olli Kilpela, Ville Antero Saanila, Wei Li, Kai-Erik Elers, Juhana Kostamo +1 more | 2004-11-23 |
| 6794314 | Method of forming ultrathin oxide layer | Yong-Bae Kim, Marko Tuominen, Suvi Haukka | 2004-09-21 |
| 6780704 | Conformal thin films over textured capacitor electrodes | Suvi Haukka, Ernst H. A. Granneman | 2004-08-24 |
| 6764546 | Apparatus and method for growth of a thin film | — | 2004-07-20 |
| 6759325 | Sealing porous structures | Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka, Kai-Erik Elers, Marko Tuominen +3 more | 2004-07-06 |
| 6749687 | In situ growth of oxide and silicon layers | Armand P. Ferro, Derrick W. Foster | 2004-06-15 |
| 6727169 | Method of making conformal lining layers for damascene metallization | Suvi Haukka, Ville Antero Saanila, Pekka Soininen, Kai-Erik Elers, Ernst H. A. Granneman | 2004-04-27 |
| 6720531 | Light scattering process chamber walls | Paul Jacobson | 2004-04-13 |
| 6708700 | Cleaning of semiconductor processing chambers | Franciscus Bernardus Maria Van Bilsen | 2004-03-23 |
| 6704496 | High temperature drop-off of a substrate | Paul Jacobson, Ravinder Aggarwal, Robert C. Haro | 2004-03-09 |
| 6703708 | Graded thin films | Christiaan J. Werkhoven, Suvi Haukka | 2004-03-09 |
| 6699783 | Method for controlling conformality with alternating layer deposition | Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka | 2004-03-02 |
| 6686271 | Protective layers prior to alternating layer deposition | Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka | 2004-02-03 |