Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821889 | Production of elemental thin films using a boron-containing reducing agent | Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2004-11-23 |
| 6820570 | Atomic layer deposition reactor | Olli Kilpela, Ville Antero Saanila, Wei Li, Juhana Kostamo, Ivo Raaijmakers +1 more | 2004-11-23 |
| 6800552 | Deposition of transition metal carbides | Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2004-10-05 |
| 6794287 | Process for growing metal or metal carbide thin films utilizing boron-containing reducing agents | Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2004-09-21 |
| 6767582 | Method of modifying source chemicals in an ald process | — | 2004-07-27 |
| 6759325 | Sealing porous structures | Ivo Raaijmakers, Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka, Marko Tuominen +3 more | 2004-07-06 |
| 6727169 | Method of making conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Ville Antero Saanila, Pekka Soininen, Ernst H. A. Granneman | 2004-04-27 |
| 6679951 | Metal anneal with oxidation prevention | Pekka Soininen, Ernst H. A. Granneman | 2004-01-20 |