Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6820570 | Atomic layer deposition reactor | Olli Kilpela, Wei Li, Kai-Erik Elers, Juhana Kostamo, Ivo Raaijmakers +1 more | 2004-11-23 |
| 6821889 | Production of elemental thin films using a boron-containing reducing agent | Kai-Erik Elers, Sari Johanna Kaipio, Pekka Soininen | 2004-11-23 |
| 6800552 | Deposition of transition metal carbides | Kai-Erik Elers, Suvi Haukka, Sari Johanna Kaipio, Pekka Soininen | 2004-10-05 |
| 6794287 | Process for growing metal or metal carbide thin films utilizing boron-containing reducing agents | Kai-Erik Elers, Sari Johanna Kaipio, Pekka Soininen | 2004-09-21 |
| 6727169 | Method of making conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Pekka Soininen, Kai-Erik Elers, Ernst H. A. Granneman | 2004-04-27 |