Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831315 | Conformal thin films over textured capacitor electrodes | Ivo Raaijmakers, Suvi Haukka | 2004-12-14 |
| 6820570 | Atomic layer deposition reactor | Olli Kilpela, Ville Antero Saanila, Wei Li, Kai-Erik Elers, Juhana Kostamo +1 more | 2004-11-23 |
| 6780704 | Conformal thin films over textured capacitor electrodes | Ivo Raaijmakers, Suvi Haukka | 2004-08-24 |
| 6759325 | Sealing porous structures | Ivo Raaijmakers, Pekka Soininen, Suvi Haukka, Kai-Erik Elers, Marko Tuominen +3 more | 2004-07-06 |
| 6727169 | Method of making conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Ville Antero Saanila, Pekka Soininen, Kai-Erik Elers | 2004-04-27 |
| 6699783 | Method for controlling conformality with alternating layer deposition | Ivo Raaijmakers, Pekka Soininen, Suvi Haukka | 2004-03-02 |
| 6686271 | Protective layers prior to alternating layer deposition | Ivo Raaijmakers, Pekka Soininen, Suvi Haukka | 2004-02-03 |
| 6679951 | Metal anneal with oxidation prevention | Pekka Soininen, Kai-Erik Elers | 2004-01-20 |