Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6820570 | Atomic layer deposition reactor | Ville Antero Saanila, Wei Li, Kai-Erik Elers, Juhana Kostamo, Ivo Raaijmakers +1 more | 2004-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6820570 | Atomic layer deposition reactor | Ville Antero Saanila, Wei Li, Kai-Erik Elers, Juhana Kostamo, Ivo Raaijmakers +1 more | 2004-11-23 |