Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776849 | Wafer holder with peripheral lift ring | Tony Keeton, Matthew G. Goodman | 2004-08-17 |
| 6704496 | High temperature drop-off of a substrate | Paul Jacobson, Ivo Raaijmakers, Robert C. Haro | 2004-03-09 |
| 6696367 | System for the improved handling of wafers within a process tool | Jim Kusbel, Jim Alexander | 2004-02-24 |