Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776849 | Wafer holder with peripheral lift ring | Ravinder Aggarwal, Tony Keeton | 2004-08-17 |
| 6729875 | Susceptor pocket profile to improve process performance | — | 2004-05-04 |
| 6709267 | Substrate holder with deep annular groove to prevent edge heat loss | Mark Hawkins, Loren Jacobs | 2004-03-23 |