Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821825 | Process for deposition of semiconductor films | Michael A. Todd | 2004-11-23 |
| 6709267 | Substrate holder with deep annular groove to prevent edge heat loss | Matthew G. Goodman, Loren Jacobs | 2004-03-23 |
| 6692576 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more | 2004-02-17 |