Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6709267 | Substrate holder with deep annular groove to prevent edge heat loss | Mark Hawkins, Matthew G. Goodman | 2004-03-23 |
| 6692576 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +1 more | 2004-02-17 |