Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825130 | CVD of porous dielectric materials | — | 2004-11-30 |
| 6821825 | Process for deposition of semiconductor films | Mark Hawkins | 2004-11-23 |
| 6818570 | Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength | Naoto Tsuji, Yukihiro Mori, Satoshi Takahashi, Kiyohiro Matsushita, Atsuki Fukazawa | 2004-11-16 |
| 6767830 | Br2SbCH3 a solid source ion implant and CVD precursor | Ziyun Wang, Chongying Xu, Thomas H. Baum, Niamh McMahon | 2004-07-27 |
| 6743738 | Dopant precursors and processes | — | 2004-06-01 |
| 6733830 | Processes for depositing low dielectric constant materials | — | 2004-05-11 |
| 6716713 | Dopant precursors and ion implantation processes | — | 2004-04-06 |
| 6716751 | Dopant precursors and processes | — | 2004-04-06 |