Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818570 | Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength | Naoto Tsuji, Yukihiro Mori, Satoshi Takahashi, Kiyohiro Matsushita, Michael A. Todd | 2004-11-16 |
| 6759344 | Method for forming low dielectric constant interlayer insulation film | Nobuo Matsuki, Yoshinori Morisada, Manabu Kato | 2004-07-06 |