Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818570 | Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength | Naoto Tsuji, Yukihiro Mori, Satoshi Takahashi, Atsuki Fukazawa, Michael A. Todd | 2004-11-16 |