Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818570 | Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength | Yukihiro Mori, Satoshi Takahashi, Kiyohiro Matsushita, Atsuki Fukazawa, Michael A. Todd | 2004-11-16 |
| 6740602 | Method of forming low-dielectric constant film on semiconductor substrate by plasma reaction using high-RF power | Menso Hendriks, Satoshi Takahashi | 2004-05-25 |