Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6767830 | Br2SbCH3 a solid source ion implant and CVD precursor | Chongying Xu, Thomas H. Baum, Michael A. Todd, Niamh McMahon | 2004-07-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6767830 | Br2SbCH3 a solid source ion implant and CVD precursor | Chongying Xu, Thomas H. Baum, Michael A. Todd, Niamh McMahon | 2004-07-27 |