Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822107 | Chemical vapor deposition precursors for deposition of copper | Thomas H. Baum, Gautam Bhandari | 2004-11-23 |
| 6767830 | Br2SbCH3 a solid source ion implant and CVD precursor | Ziyun Wang, Thomas H. Baum, Michael A. Todd, Niamh McMahon | 2004-07-27 |
| 6740586 | Vapor delivery system for solid precursors and method of using same | Luping Wang, Thomas H. Baum | 2004-05-25 |
| 6735978 | Treatment of supercritical fluid utilized in semiconductor manufacturing applications | Glenn M. Tom, Michael B. Korzenski, Eliodor G. Ghenciu, Thomas H. Baum | 2004-05-18 |
| 6736993 | Silicon reagents and low temperature CVD method of forming silicon-containing gate dielectric materials using same | Thomas H. Baum, Bryan C. Hendrix | 2004-05-18 |