Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833024 | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions | Mark Holst, Rebecca Faller, Jose I. Arno, Ray Dubois | 2004-12-21 |
| 6764755 | Channelized sorbent media, and methods of making same | Steven J. Hultquist | 2004-07-20 |
| 6749671 | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Jose I. Arno, Rebecca Faller | 2004-06-15 |
| 6735978 | Treatment of supercritical fluid utilized in semiconductor manufacturing applications | Michael B. Korzenski, Eliodor G. Ghenciu, Chongying Xu, Thomas H. Baum | 2004-05-18 |