Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833024 | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions | Mark Holst, Rebecca Faller, Glenn M. Tom, Ray Dubois | 2004-12-21 |
| 6821795 | Infrared thermopile detector system for semiconductor process monitoring and control | — | 2004-11-23 |
| 6759018 | Method for point-of-use treatment of effluent gas streams | Mark Holst, Sam Yee, Joseph D. Sweeney, Jeff Lorelli, Jason Deseve | 2004-07-06 |
| 6749671 | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Rebecca Faller, Glenn M. Tom | 2004-06-15 |
| 6716271 | Apparatus and method for inhibiting decomposition of germane | Edward A. Sturm, Luping Wang, James Dietz | 2004-04-06 |